Although after 2000, the CAD of this graphic generator is replaced with the automatic control software, and now it can only rely on this component to convert the digital signal of the processing program into a graph.

As the mother version of the chip line diagram, the accuracy requirements of the mask are obviously higher than that of the optical carvings. It belongs to the most advanced nanotechnology!

However, Lao Luo did not see his electronic beam engraving machine, and passed away. Of course, he did not see the decline of domestic equipment. This is also a lucky.

Li Sanbiao couldn't treat cancer, but I planned to let Lao Luo live to see it. With a full set of domestic equipment, you can also make chips.

Li Sanbiao saw that Lao Luo was working in the desk, his brows were locked.

Shen Tianhui asked: "Lao Luo, our graphics generator is the third generation, and it should be very experienced. What are the problems?"

Lao Luo Dao: "The design drawings provided by the chipset, the complexity of the circuit exceeds my expectations. To draw such a complex exposure graphic, our memory is not enough."

Optical carvings, electronic beam printed chips or mask are called exposure, the more advanced the CPU, the more crystal tube on it, the more complicated the design, the more complicated the exposure graphics required.

And in the era of 286, the chip structure has more than one floor. Li Sanbiao's 286 chip is designed as 4 layers.

In the past, an exposure was called a single -layer single -layer exposure, and the 286 process was required to expose a single multi -layer exposure. It was exposed in different positions and even the larger chip.

And it is not just exposed with the same dose beam.

The number of transistors of 286 reached 134,000, which was five times more than 28,000 than 8086. The complexity of the exposure graph was naturally five times.

Without CAD,

Enter the engraving command of 130,000 transistors, and you need to consume the huge energy of Lao Luo.

And the graphical generator cannot handle this ultra -complex graphic, regardless of the CPU or memory.

This is even more complicated than the Renno game machine single screen.

Li Sanbiao saw that Lao Luo also used the 6502 processor, thinking of the previous method of studying the learning machine, saying: "Lao Luo, I give you a suggestion, don't always think of the CPU to calculate and draw at the same time. I have a dedicated display chip here here. , Link it on the CPU, you can greatly reduce the pressure of operation. "

Old Loton, said: "So, research shows the dedicated CPU, why didn't I think of it!"

Li Sanbiao brought another 512K memory bar that supports other groups,

This memory note uses the complex printing line board technology later, which can use dozens of 4K memory particles in combination.

Li Sanbiao said again: "Actually, I have written a CAD1.0 software, and I don't need to lose code. I can help you make an excuse. As long as you draw the exposure diagram in the plane, it can be easily imported!

It is also convenient to modify! "

Li Sanbiao operated on the computer for a while, and quickly wrote an interface program for CAD and graphical generators based on the design of Lao Luo.

Then, the chip map from the design group, according to the requirements of the mask design, draws the CAD version of the mask.

Draw different colors on CAD, representing various exposure doses.

When an excessive exposure of the 5x light wire intensity, 2 microns are formed, which is a micro -wire.

The distance between the crystal pipe is used in micron, which does not mean that the bald head moves every time it is moved by micron,

After all, the transistor is a distance of 3 nanometers. If this is the case, wouldn't the large bald head only move according to the micro -world atomic distance?

In fact, the laser head is actually a high -power electronic microscope. It emits not only the light, but the energy is enough to etch the surface of the object.

The electronic microscope is the core component is an electromagnetic lens. It uses the electromagnetic principle to move the beam generated by the bald head to achieve a similar optical lens effect.

But it is actually magnetic size to control its focal length, that is, the current in the electromagnetic coil that generates magnetic force,

Therefore, the bald electronic bundle can be turned through the electromagnetic lens to achieve accurate bias, so the mechanical accuracy does not need to be so high!

Many people faintly feel that the mechanical accuracy of the Dragon Kingdom is not enough, so it is impossible to have the most precise light carved machine. This is really too much!

The accuracy of the electronic lens is actually only determined by the wavelength of light source, which has nothing to do with mechanical accuracy!

Scientific and technological progress can use advanced principles and design methods to crush the old craftsmanship of the cooked rice immortal!

It is easy to say, Li Sanbiao and Lao Luo have done everything, it has been two weeks, and finally started formal testing.

Li Sanbiao was put in the mask with photoscience, adjusting the electron microscope, optimizing some electron microscope parameters, set the 400 micrometer exposure field through the electron microscope control window, and then accurately adjusted the workpiece table to the electron microscope.

In the sound of nervous breathing, Li Sanbiao started its first experiment with this domestic machine.

After careful focus on the mask, the electron beam is temporarily closed. Set appropriate exposure parameters in the exposure window and start the first exposure.

Remove the mask to see the eye, observe it under the optical microscope. After the inspection is correct, perform the second layer of exposure.

There are many layers in the chip or mask, and if there are flaws on each layer, this product has been invalidated.

In the past, the rate of waste was very high. When Motorola invested 6800 chips in the early 1970s, the technology has made a breakthrough that the chip can be mass -produced. Before that, the waste rate rate was as high as 95%during the production of the chip.

Li Sanbiao has a total of four layers of mask. With other structures, it takes seven or eight exposures.

The first sample appeared in the fifth exposure, burned a large part of the crystal area, and announced failure.

Excessive exposure indicates that this light -engraved glue cannot withstand the scheduled exposure parameters, and the bald power needs to be reduced.

After four or five attempts, Li Sanbiao and Lao Luo finally mastered the exposure relationship between photoresal glue and electron beams, and engraved the first national mask!

After repeated inspections of many people with a light -mirror electron microscope, it proves that this mask is perfect!

Lao Luo's forty -year -old man, he even flowed out of tears.

"Great, we finally saw the domestic mask before, now I am willing to die!"

Li Sanbiao said; "President Luo, you go to see a doctor first, we also have to study domestic lithography equipment. You can definitely see it alive!"

Luo Jianfu refused to believe it, saying: "Cancer is a disease. I don't want to delay time and waste the money of the country. You can let me join the research team of the light carved machine!"

For a while, Li Sanbiao and Shen Tianhui were helpless, and I couldn't bear to cold Lao Luo's heart, as long as they agreed.

Shen Tianhui said: "In fact, there are many light carved machines in other units, and we don’t have to develop from scratch,"

Li Sanbiao asked: "What are the domestic photoblast equipment at present? How about the level? Have you ever seen it?"
Chapter completed!